Na、Mg共掺杂ZnO薄膜的结构及性能研究
Study on Structure and Property of ZnO Thin Film Doped with Na and Mg
艾国齐, 谭红琳, 马正洪
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作者单位：(昆明理工大学 材料科学与工程学院, 云南 昆明 650093)
中文关键字：掺杂浓度； 溶胶-凝胶法； ZnO薄膜； 薄膜结构； 光学性能
英文关键字：doping concentration; sol-gel method; ZnO film; membrane structure; optical properties
中文摘要：在玻璃衬底上，采用溶胶-凝胶法制备Na、Mg共掺杂的ZnO薄膜，Mg含量不变，改变Na的掺杂含量，研究掺杂浓度、退火温度及镀膜层数对薄膜结构和光学性能的影响。结果表明：薄膜形貌在550 ℃退火时较好；Na离子含量会影响薄膜(002)晶面的生长；镀膜层数增加，薄膜有明显红移现象并且透光率会降低。
英文摘要：On glass substrate, ZnO film doped with Na and Mg was prepared using sol-gel process. The effects of doping concentration, annealing temperature and the number of coating layer on microstructure and optical properties were studied on the condition of changing the content of doping Na and fixing Mg content. The results show that the film morphology is better after tempered at 550 ℃. Na content can affect the growth of film's (002) faces. The film has obvious redshift phenomenon and its euphotic rate reduces with the increases of the number of coating layer.