Ti6Al4V表面TiNTi复合膜的制备及摩擦学性能研究
Study on the Preparation and Tribological Properties of TiN /Ti Composite Films on Ti6Al4V surface
张敏
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作者单位：太原理工大学
中文关键字：Ti6Al4V；磁控溅射；复合膜；摩擦学性能
英文关键字：Ti6Al4V; TiN/Ti Composite Films; DC magnetron sputtering ; wear behaviors
中文摘要：采用直流磁控溅射法在Ti6Al4V表面制备TiN/Ti复合膜。分别用FESEM、GDEOS、XRD分析薄膜表面的成分及相结构；利用划痕仪分析膜基结合强度；并通过球盘磨损机和轮廓仪测试磨痕形貌和磨损体积，评价膜层的摩擦学性能。结果表明，TiN/Ti复合膜表面致密光滑，呈金黄色金属光泽。膜基结合强度大于100N。表面镀有TiN/Ti复合膜的Ti6Al4V合金虽没有减磨作用，但是明显提高了耐磨性能。
英文摘要：TiN/Ti composite membrane was deposited by DC magnetron sputtering on Ti6Al4V surface. The surface and cross-section morphologies, composition and phase structure of TiN/Ti composite membrane were characterized by FESEM, GDOES and XRD, respectively. The adhesion between substrate and film was analyzed by scratch test. The wear resistance of TiN/Ti composite film was investigated by ball on disc wear test and white light interference. The results indicate that TiN/Ti films exhibit smooth surface and dense structure columnar crystal with cascade-like glacier feature, show well bonding strength and obviously improvement of wear resistance.