纯钛TA2表面等离子Nb合金化工艺研究
Study on Plasma Niobium Alloying Process for Pure Titanium TA2
王振霞1, 王田喆2, 王英芹1, 贺志勇1
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作者单位：(1. 太原理工大学 表面工程研究所, 山西 太原 030024; 2. 北方自动控制技术研究所, 山西 太原 030024)
中文关键字：TA2； Nb合金化； 工艺参数
英文关键字：TA2; niobium alloying; process parameters
中文摘要：研究了纯钛TA2表面等离子Nb合金化工艺实验。分析了预轰击时间、放电气压、源极电压、工件电压、工件温度和保温时间等参数对渗层Nb含量的影响， 在此基础上得到优化的工艺参数。 结果表明：预轰击时间较长能够获得Nb含量较高的渗层； 气压65 Pa可以得到最佳质量的渗层； 合理的源极电压为600～500 V，工件电压为400～200 V；温度、时间的影响规律符合一般的扩散定律，适宜的处理温度为1000 ℃，保温时间为4 h。
英文摘要：The process experiments of plasma Nb alloying on pure titanium TA2 surface by double glow discharge were studied. The effects of process parameters(including prebombardment time, discharge pressure, source voltage, cathode voltage, workpiece temperature and holding time) on Nb content in alloyed layer were analyzed. On this basis, optimized process conditions were obtained. The results show that the longer the prebombardment time, the higher Nb content is; the optimal alloying layer can be obtained at the discharge pressure of 65 Pa; the reasonable source voltage is 500～600 V, the workpiece voltage is 400～200 V. The kinetics of temperature and time is in accordance with general diffusion law and the appropriate temperature is 1000 ℃, holding time is 4 h.