C+Cr离子注入对硬质合金的表面改性
Surface Modification of Hard Alloy by C + Cr Ion Implantation
王世兴1,2, 熊碧军3, 田修波1,2, 杨士勤1,2
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作者单位：1. 哈尔滨工业大学 材料科学与工程学院, 黑龙江 哈尔滨 150001; 2. 深圳航天科技创新研究院, 广东 深圳 518057;3. 哈尔滨工业大学 深圳研究生院, 广东 深圳 518055)
中文关键字：硬质合金； 表面改性； C+Cr离子注入
英文关键字：hard alloy; surface modification; C+Cr ion implantation
中文摘要：应用金属蒸汽真空弧离子源技术，在硬质合金表面进行了几种不同剂量的C+Cr离子注入，旨在研究其表面改性的情况。结果表明：在试样的表面结构方面，应用X射线衍射、拉曼光谱以及金相显微观察等测试手段，发现有C、Cr、Cr3C2等新相生成，此外C+Cr离子注入还对表面形成类金刚石结构有抑制作用；在试样的表面性能方面，发现注入后的表面硬度、摩擦系数、防腐蚀能力得到了明显的增强。分析认为，注入后的硬质合金表面改性不仅受到新相生成的影响，而且同时也与注入本身的机制有关。
英文摘要：Two elements of carbon and chromium were implanted into the hard alloy surface by metal vapor vacuum arc (MEVVA) source with several different doses. The surface modification of the hard alloy was studied. The structure of sample surface was characterized and analyzed with X-ray diffraction, raman spectrum and metallurgical microscope. The results show that some new phases of C, Cr and Cr3C2 exist in the surface of sample, and C+Cr ion implantation restraints the formation of DLC structure in the surface. Moreover, the performances of sample surface, such as microhardness, friction coefficient and corrosion resistance are evidently enhanced. In conclusion, the surface modification of the hard alloy is not only affected by the appearance of new phase, but also related to the mechanism of implantation.