氧化条件对AAO阵列显微形貌与晶体结构的影响及自组织机理研究
Effect of Oxidation Condition on Morphology and Crystal Structure of AAO and Study on Self-organization Mechanism
赵恩格, 张正富
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作者单位：(昆明理工大学 材料科学与工程学院, 云南 昆明 650093)
中文关键字：多孔氧化铝模板； 阳极氧化； 显微形貌； 自组织机理
英文关键字：aluminum oxide template; anodic oxidization; morphology; self-organization mechanism
中文摘要：以草酸为电解液，分别用一次氧化法和二次氧化法制备了阳极氧化铝(AAO)模板。采用原子力显微镜和X射线衍射仪分别对其显微形貌和晶体结构进行表征。结果表明：一次氧化法制得的AAO模板正面孔洞排列有序性较差，而反面纳米花样排列较为规则；二次氧化法制得的模板孔洞排列很规则，且经扩孔腐蚀后，孔径变大，晶体结构由多晶态Al2O3转变为AlPO4；不同氧化电压下晶体结构存在差异。简要探讨了AAO模板形成机理。
英文摘要：Porous anodic aluminum oxide templates were prepared by one-step and two-step anodization approach where oxalic acid solution was employed as an electrolyte. The morphology, crystal structure of AAO template were investigated by atomic force microscope (AFM) and XRD. The results show that the pores in the face side are poorly ordered while the nano-array homogeneity in the back side is better for the templates made by one-step method and that by two-step method is more regular. After being etched by phosphorus acid, the diameters of holes become bigger, the crystal structure of the AAO template changes from multi-crystal alumina to crystal aluminum phosphate, the crystal structure for the templates prepared under different voltages has difference. The mechanism of AAO templates self-organization is briefly discussed.