单晶硅衬底对Si-Al合金中块体硅生长的影响

    Effect of Single Crystal Silicon Substrate on Bulk Silicon Growth in Si-Al Alloy

    • 摘要: 硅与合金熔体的分离及合金元素的回收再利用一直是限制Si-Al合金凝固精炼工艺进一步应用的关键问题。本文采用温度梯度区域熔炼方法在Si-Al合金中生长块体硅。通过在合金熔体的底部引入单晶硅衬底,研究单晶衬底对于块体硅生长的形貌及杂质分布的影响。结果表明,单晶硅衬底的添加降低了合金熔体的温度梯度,块体硅以平直界面向上生长,生长速率明显变慢。在温度梯度2.4 K/mm和生长时间240 min时,块体硅的生长速率由石墨坩埚上的0.108 μm/s下降至Si (100)衬底上的0.075 μm/s。在相同的温度梯度和生长时间内,块体硅在Si (100)衬底上的生长速率明显快于Si (111)衬底。单晶硅衬底在块体硅生长过程中起到籽晶的作用。

       

      Abstract: The separation of silicon from alloy melt, and the recovery and reuse of alloy elements are key issues limiting the further application of Si-Al alloy solidification refining process. The temperature gradient zone melting method was used for the growth of bulk silicon in Si-Al alloy. By introducing a single crystal silicon substrate at the bottom of the alloy melt, the influence on the morphology of bulk silicon growth and impurity distribution was studied. The results show that the addition of a single crystal silicon substrate reduces the temperature gradient of the alloy melt, bulk silicon grows up with a straight interface, and the growth rate is significantly slower. When the temperature gradient is 2.4 K/mm and the growth time is 240min, the growth rate of bulk silicon decreases from 0.108 μm/s on the graphite crucible to 0.075 μm/s on the Si(100)substrate. At the same temperature gradient and growth time, the growth rate of bulk silicon on the Si(100) substrate is significantly faster than that of the Si(111) substrate. The single-crystal silicon substrate plays as seed crystal during bulk silicon growth.

       

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