Abstract: In order to obtain a mold product with good comprehensive performance, it is necessary to study the scanning electron beam thermal polishing technology with different inclined angle bevels. The finite element software was used to simulate the thermal process of scanning electron beam polishing 45 steel surface, and the distribution law of temperature field was studied. The effects of process parameters such as beam source power, moving speed and scanning frequency on the temperature field were discussed. The results show that the maximum temperature is nonlinear with the beam source power. In the case of the same power, the larger the tilt angle, the smaller the maximum temperature gradient and the maximum temperature gradient x, y and z components. When the power is 540 W, the maximum temperature gradient of the slope with an inclination angle of 5° is about 1.5 times of the maximum temperature gradient of the horizontal plane. As the tilt angle and work piece movement speed increase, the maximum temperature gradient of the material surface and the components of the maximum temperature gradient x, y and z-axis exhibit a nonlinear decrease. Under different tilt angle, too high scan frequency can lead to a trend of higher temperature gradients on the surface of the material and higher x, y and z-axis components of the temperature gradient.