Abstract: The AISI316L austenitic stainless steel was deformed at room temperature with tensile rate of 10%, 30% and 50%, respectively, and then ion nitrided at 380 ℃. The microstructure and corrosion resistance of nitriding samples were compared and analyzed, and the effects of different deformation on the low temperature ion nitriding behavior of austenitic stainless steel were discussed. The results show that the deformation can promote the diffusion rate of nitrogen atoms in the matrix during low temperature nitriding, it can greatly increase the thickness and hardness of the nitrided layer at the same time.However, it will reduce the corrosion resistance of the nitrided layer with the increase of deformation, the thickness of infiltration layer increases first and then decreases, and 30% tensile rate is the best deformation rate. When the deformation reaches 50%, the appearance of nitride and cottrell atmosphere weakens the promotion of deformation at room temperature to nitriding process.