TiZrHf中熵合金表面MPCVD法制备金刚石-碳化物涂层及其摩擦磨损性能研究

Study on Friction and Wear Property of Diamond-carbide Coatings Synthesized on TiZrHf Mid-entropy Alloy by MPCVD Method

摘要: 采用微波等离子化学气相沉积（MPCVD）法，以高纯甲烷和氢气为反应气体，在TiZrHf中熵合金表面碳化-沉积获得碳化物/金刚石涂层。利用扫描电镜、X射线衍射仪、显微硬度计、摩擦磨损等方法表征了不同甲烷浓度条件下涂层的组织结构、物相组成、硬度及耐磨性能。结果表明，碳化-沉积后涂层的主要成分为金属碳化物和纳米金刚石颗粒，表面硬度明显提升。其中，甲烷浓度为3%时，涂层的表面硬度最高（约660.2 HV），摩擦系数最低，且耐磨性得到极大改善。

Abstract: Diamond-carbide coatings were synthesized on TiZrHf mid-entropy alloy by microwave plasma chemical vapor deposition（MPCVD） method with high-purity methane（CH₄） and hydrogen（H₂） as reaction gases. The structure, phase composition, hardness and wear property of the coatings were obtained under the condition of different CH₄ concentration.The results show that the main components of the coatings after carbonization-deposition are metallic carbide and nanodiamond particles,and the surface hardness is enhanced obviously. Among them, the coatings prepared with 3% methane concentration possess the highest hardness（about 660.2 HV） and the lowest friction coefficient, and the wear-resisting property was modified significantly.