电子束大角度高速偏转束流品质调控技术研究

    Research on Beam Quality Control Technology for Large Angle and High Speed Deflection of Electron Beams

    • 摘要: 电子束选区熔化制造技术是利用电子束高速偏转扫描进行基体预热、粉末预热以及熔化粉末,实现复杂结构零部件近净成形的增材制造技术。然而,大角度偏转会导致电子束行程增加,电子束束斑会出现像差,影响零件的热输入,导致成形质量差。建立了电子束选区熔化设备1∶1三维模型,利用CST电磁仿真粒子工作室对整个束流产生过程进行模拟。针对大角度偏转后电子束焦点束斑形貌变差的问题,设计了电子束高速偏转、动态聚焦和消像散线圈,实现了同步调节束斑的束流品质。束流品质仿真与实际加工验证相结合,证明本次同步调节改善了成形零件的质量。

       

      Abstract: Electron beam selective melting manufacturing technology is an additive manufacturing technology that uses high-speed deflection scanning of electron beams to achieve substrate preheating, powder preheating and powder melting,ultimately achieves near-net shape of complex structural parts. However, large angle deflection can cause the electron beam stroke to increase, and the aberration of the electron beam spot will appear, which affects the heat input of the part and leads to poor forming quality. A 1∶1 three-dimensional model of the electron beam selective melting equipment was established, and the entire beam generation process was simulated using the CST electromagnetic simulation particle studio. Aiming at the problems of poor morphology of electron beam after large angle deflection, the high-speed deflection, dynamic focusing and astigmatism coils for the electron beam were designed to achieve synchronous adjustment of the beam quality of the beam spot. The combination of beam quality simulation and actual processing verification proves that the synchronous adjustment has greatly improved the quality of formed parts.

       

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