Effect of Extrusion Temperature on Microstructure and Properties of Molybdenum Tube Targets for Magnetron Sputtering

The molybdenum tube blanks were prepared by cold isostatic pressing and hydrogen sintering using conventional commercially available molybdenum powder with a Fisher particle size of 2.0 μm-3.0 μm and a bulk density of 1.0 g/cm³-1.6 g/cm³. The molybdenum tube was formed by hot extrusion using a 2.5 MN horizontal extruder at two extrusion temperatures of 1210 ℃ and 1320 ℃, and the density, hardness, mechanical properties and metallographic structure of the molybdenum tube after extrusion were analyzed. The experimental results of two different extrusion temperatures were compared and analyzed. The results show that the molybdenum tube target with excellent structure and properties can be obtained by using appropriate extrusion process.